5/28/2010	12:01:16 AM	BCl3 valve closed
5/28/2010	12:01:16 AM	PH3 valve closed
5/28/2010	12:01:16 AM	SiCl4 pre valve closed
5/28/2010	12:01:16 AM	SiCl4 post valve closed
5/28/2010	12:01:16 AM	Main Vac valve closed
5/28/2010	12:01:16 AM	Bypass valve closed
5/28/2010	12:01:16 AM	Helium valve opened
5/28/2010	12:01:16 AM	H2 valve opened
5/28/2010	12:01:16 AM	Bubbler valve opened
5/28/2010	12:01:16 AM	Helium MFC set to  475.000000
5/28/2010	12:01:16 AM	H2 MFC set to  10.000000
5/28/2010	12:01:16 AM	BCl3 MFC set to  0.000000
5/28/2010	12:01:16 AM	PHl3 MFC set to  0.000000
5/28/2010	12:01:16 AM	SiCl4 MFC set to  0.000000
5/28/2010	12:01:16 AM	Bypass solenoid MFC set to  0.000000
5/28/2010	12:01:16 AM	Tube furnace set to 800
5/28/2010	12:12:05 AM	BCl3 valve closed
5/28/2010	12:12:05 AM	PH3 valve closed
5/28/2010	12:12:05 AM	SiCl4 pre valve closed
5/28/2010	12:12:05 AM	SiCl4 post valve closed
5/28/2010	12:12:05 AM	Main Vac valve closed
5/28/2010	12:12:05 AM	Bypass valve closed
5/28/2010	12:12:05 AM	Helium valve opened
5/28/2010	12:12:05 AM	H2 valve opened
5/28/2010	12:12:05 AM	Bubbler valve opened
5/28/2010	12:12:05 AM	Helium MFC set to  475.000000
5/28/2010	12:12:05 AM	H2 MFC set to  10.000000
5/28/2010	12:12:05 AM	BCl3 MFC set to  0.000000
5/28/2010	12:12:05 AM	PHl3 MFC set to  0.000000
5/28/2010	12:12:05 AM	SiCl4 MFC set to  0.000000
5/28/2010	12:12:05 AM	Bypass solenoid MFC set to  0.000000
5/28/2010	12:12:05 AM	Tube furnace set to 800
5/28/2010	12:22:05 AM	H2 valve closed
5/28/2010	12:22:05 AM	BCl3 valve closed
5/28/2010	12:22:05 AM	There was an error trying to close the PH3 valve.  It remains opened. 
5/28/2010	12:38:27 AM	SiCl4 pre valve closed
5/28/2010	12:38:27 AM	SiCl4 post valve closed
5/28/2010	12:38:27 AM	Main Vac valve closed
5/28/2010	12:38:27 AM	Bypass valve closed
5/28/2010	12:38:27 AM	Helium valve opened
5/28/2010	12:38:27 AM	Bubbler valve opened
5/28/2010	12:38:27 AM	Helium MFC set to  400.000000
5/28/2010	12:38:27 AM	H2 MFC set to  0.000000
5/28/2010	12:38:27 AM	BCl3 MFC set to  0.000000
5/28/2010	12:38:27 AM	PHl3 MFC set to  0.000000
5/28/2010	12:38:27 AM	SiCl4 MFC set to  0.000000
5/28/2010	12:38:27 AM	Bypass solenoid MFC set to  0.000000
5/28/2010	12:38:27 AM	Tube furnace set to 0
5/28/2010	12:38:28 AM	Helium valve closed
5/28/2010	12:38:28 AM	H2 valve closed
5/28/2010	12:38:28 AM	BCl3 valve closed
5/28/2010	12:38:28 AM	PH3 valve closed
5/28/2010	12:38:28 AM	SiCl4 pre valve closed
5/28/2010	12:38:28 AM	SiCl4 post valve closed
5/28/2010	12:38:28 AM	Main Vac valve closed
5/28/2010	12:38:28 AM	Bypass valve closed
5/28/2010	12:38:28 AM	Bubbler valve closed
5/28/2010	12:38:28 AM	Helium MFC set to  0.000000
5/28/2010	12:38:28 AM	H2 MFC set to  0.000000
5/28/2010	12:38:28 AM	BCl3 MFC set to  0.000000
5/28/2010	12:38:28 AM	PHl3 MFC set to  0.000000
5/28/2010	12:38:28 AM	SiCl4 MFC set to  0.000000
5/28/2010	12:38:28 AM	Bypass solenoid MFC set to  0.000000
5/28/2010	12:38:28 AM	Tube furnace set to 0
5/28/2010	12:38:28 AM	Run finished at 12:38 AM
5/28/2010	12:40:02 AM	Recipe started at 12:40 AM
5/28/2010	12:40:02 AM	H2 valve closed
5/28/2010	12:40:02 AM	BCl3 valve closed
5/28/2010	12:40:02 AM	PH3 valve closed
5/28/2010	12:40:02 AM	SiCl4 pre valve closed
5/28/2010	12:40:02 AM	SiCl4 post valve closed
5/28/2010	12:40:02 AM	Main Vac valve closed
5/28/2010	12:40:02 AM	Bypass valve closed
5/28/2010	12:40:02 AM	Bubbler valve closed
5/28/2010	12:40:02 AM	Helium valve opened
5/28/2010	12:40:02 AM	Helium MFC set to  475.000000
5/28/2010	12:40:02 AM	H2 MFC set to  0.000000
5/28/2010	12:40:02 AM	BCl3 MFC set to  0.000000
5/28/2010	12:40:02 AM	PHl3 MFC set to  0.000000
5/28/2010	12:40:02 AM	SiCl4 MFC set to  0.000000
5/28/2010	12:40:02 AM	Bypass solenoid MFC set to  0.000000
5/28/2010	12:40:02 AM	Tube furnace set to 200
5/28/2010	12:40:05 AM	H2 valve closed
5/28/2010	12:40:05 AM	BCl3 valve closed
5/28/2010	12:40:05 AM	PH3 valve closed
5/28/2010	12:40:05 AM	SiCl4 pre valve closed
5/28/2010	12:40:05 AM	SiCl4 post valve closed
5/28/2010	12:40:05 AM	Main Vac valve closed
5/28/2010	12:40:05 AM	Bypass valve closed
5/28/2010	12:40:05 AM	Helium valve opened
5/28/2010	12:40:05 AM	Bubbler valve opened
5/28/2010	12:40:05 AM	Helium MFC set to  400.000000
5/28/2010	12:40:05 AM	H2 MFC set to  0.000000
5/28/2010	12:40:05 AM	BCl3 MFC set to  0.000000
5/28/2010	12:40:05 AM	PHl3 MFC set to  0.000000
5/28/2010	12:40:05 AM	SiCl4 MFC set to  0.000000
5/28/2010	12:40:05 AM	Bypass solenoid MFC set to  0.000000
5/28/2010	12:40:05 AM	Tube furnace set to 0
5/28/2010	12:55:05 AM	Helium valve closed
5/28/2010	12:55:05 AM	H2 valve closed
5/28/2010	12:55:05 AM	BCl3 valve closed
5/28/2010	12:55:05 AM	PH3 valve closed
5/28/2010	12:55:05 AM	SiCl4 pre valve closed
5/28/2010	12:55:05 AM	SiCl4 post valve closed
5/28/2010	12:55:05 AM	Main Vac valve closed
5/28/2010	12:55:05 AM	Bypass valve closed
5/28/2010	12:55:05 AM	Bubbler valve closed
5/28/2010	12:55:05 AM	Helium MFC set to  0.000000
5/28/2010	12:55:05 AM	H2 MFC set to  0.000000
5/28/2010	12:55:05 AM	BCl3 MFC set to  0.000000
5/28/2010	12:55:05 AM	PHl3 MFC set to  0.000000
5/28/2010	12:55:05 AM	SiCl4 MFC set to  0.000000
5/28/2010	12:55:05 AM	Bypass solenoid MFC set to  0.000000
5/28/2010	12:55:05 AM	Tube furnace set to 0
5/28/2010	12:55:05 AM	Run finished at 12:55 AM
5/28/2010	1:04:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/28/2010	1:04:49 AM	Recipe started at 1:04 AM
5/28/2010	1:04:49 AM	Helium valve closed
5/28/2010	1:04:49 AM	H2 valve closed
5/28/2010	1:04:49 AM	BCl3 valve closed
5/28/2010	1:04:49 AM	PH3 valve closed
5/28/2010	1:04:49 AM	SiCl4 pre valve closed
5/28/2010	1:04:49 AM	SiCl4 post valve closed
5/28/2010	1:04:49 AM	Main Vac valve closed
5/28/2010	1:04:49 AM	Bubbler valve closed
5/28/2010	1:04:49 AM	Bypass valve opened
5/28/2010	1:04:49 AM	Helium MFC set to  0.000000
5/28/2010	1:04:49 AM	H2 MFC set to  0.000000
5/28/2010	1:04:49 AM	BCl3 MFC set to  0.000000
5/28/2010	1:04:49 AM	PHl3 MFC set to  0.000000
5/28/2010	1:04:49 AM	SiCl4 MFC set to  0.000000
5/28/2010	1:04:49 AM	Bypass solenoid MFC set to  0.000000
5/28/2010	1:04:49 AM	Tube furnace set to 0
5/28/2010	1:05:35 AM	Helium valve closed
5/28/2010	1:05:35 AM	H2 valve closed
5/28/2010	1:05:35 AM	BCl3 valve closed
5/28/2010	1:05:35 AM	PH3 valve closed
5/28/2010	1:05:35 AM	SiCl4 pre valve closed
5/28/2010	1:05:35 AM	SiCl4 post valve closed
5/28/2010	1:05:35 AM	Bubbler valve closed
5/28/2010	1:05:35 AM	Main Vac valve opened
5/28/2010	1:05:35 AM	Bypass valve opened
5/28/2010	1:05:35 AM	Helium MFC set to  0.000000
5/28/2010	1:05:35 AM	H2 MFC set to  0.000000
5/28/2010	1:05:35 AM	BCl3 MFC set to  0.000000
5/28/2010	1:05:35 AM	PHl3 MFC set to  0.000000
5/28/2010	1:05:35 AM	SiCl4 MFC set to  0.000000
5/28/2010	1:05:35 AM	Bypass solenoid MFC set to  0.000000
5/28/2010	1:05:35 AM	Tube furnace set to 0
5/28/2010	1:05:35 AM	Run finished at 1:05 AM
5/28/2010	1:05:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/28/2010	10:20:56 AM	Bypass valve closed
5/28/2010	10:20:57 AM	Main Vac valve closed
5/28/2010	10:20:58 AM	Bypass valve opened
5/28/2010	10:20:59 AM	Main Vac valve opened
5/28/2010	10:21:01 AM	Program exited cleanly
5/28/2010	10:25:01 AM	Program started normally
5/28/2010	10:25:01 AM	Helium valve closed
5/28/2010	10:25:01 AM	H2 valve closed
5/28/2010	10:25:01 AM	BCl3 valve closed
5/28/2010	10:25:01 AM	PH3 valve closed
5/28/2010	10:25:01 AM	SiCl4 pre valve closed
5/28/2010	10:25:01 AM	SiCl4 post valve closed
5/28/2010	10:25:01 AM	Main Vac valve closed
5/28/2010	10:25:02 AM	Bypass valve closed
5/28/2010	10:25:02 AM	Bubbler valve closed
5/28/2010	10:25:02 AM	Helium MFC set to  0.000000
5/28/2010	10:25:02 AM	H2 MFC set to  0.000000
5/28/2010	10:25:02 AM	BCl3 MFC set to  0.000000
5/28/2010	10:25:02 AM	PHl3 MFC set to  0.000000
5/28/2010	10:25:02 AM	SiCl4 MFC set to  0.000000
5/28/2010	10:25:02 AM	Bypass solenoid MFC set to  760.000000
5/28/2010	10:25:02 AM	Tube furnace set to 0
5/28/2010	10:25:05 AM	Bypass valve opened
5/28/2010	10:25:05 AM	Main Vac valve opened
5/28/2010	10:25:15 AM	SiCl4 MFC set to  100.000000
5/28/2010	10:25:23 AM	SiCl4 MFC set to  0.000000
5/28/2010	10:26:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/28/2010	10:26:47 AM	Recipe started at 10:26 AM
5/28/2010	10:26:47 AM	H2 valve closed
5/28/2010	10:26:47 AM	BCl3 valve closed
5/28/2010	10:26:47 AM	PH3 valve closed
5/28/2010	10:26:47 AM	SiCl4 pre valve closed
5/28/2010	10:26:47 AM	SiCl4 post valve closed
5/28/2010	10:26:47 AM	Main Vac valve closed
5/28/2010	10:26:47 AM	Bypass valve closed
5/28/2010	10:26:47 AM	Bubbler valve closed
5/28/2010	10:26:47 AM	Helium valve opened
5/28/2010	10:26:47 AM	Helium MFC set to  500.000000
5/28/2010	10:26:47 AM	H2 MFC set to  0.000000
5/28/2010	10:26:47 AM	BCl3 MFC set to  0.000000
5/28/2010	10:26:47 AM	PHl3 MFC set to  0.000000
5/28/2010	10:26:47 AM	SiCl4 MFC set to  0.000000
5/28/2010	10:26:47 AM	Bypass solenoid MFC set to  0.000000
5/28/2010	10:26:47 AM	Tube furnace set to 0
5/28/2010	10:28:07 AM	Helium valve closed
5/28/2010	10:28:07 AM	H2 valve closed
5/28/2010	10:28:07 AM	BCl3 valve closed
5/28/2010	10:28:07 AM	PH3 valve closed
5/28/2010	10:28:07 AM	SiCl4 pre valve closed
5/28/2010	10:28:07 AM	SiCl4 post valve closed
5/28/2010	10:28:07 AM	Main Vac valve closed
5/28/2010	10:28:07 AM	Bypass valve closed
5/28/2010	10:28:07 AM	Bubbler valve closed
5/28/2010	10:28:07 AM	Helium MFC set to  0.000000
5/28/2010	10:28:07 AM	H2 MFC set to  0.000000
5/28/2010	10:28:07 AM	BCl3 MFC set to  0.000000
5/28/2010	10:28:07 AM	PHl3 MFC set to  0.000000
5/28/2010	10:28:07 AM	SiCl4 MFC set to  0.000000
5/28/2010	10:28:07 AM	Bypass solenoid MFC set to  0.000000
5/28/2010	10:28:07 AM	Tube furnace set to 0
5/28/2010	10:28:07 AM	Run finished at 10:28 AM
5/28/2010	10:28:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/28/2010	10:35:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/28/2010	10:35:53 AM	Recipe started at 10:35 AM
5/28/2010	10:35:53 AM	Helium valve closed
5/28/2010	10:35:53 AM	H2 valve closed
5/28/2010	10:35:53 AM	BCl3 valve closed
5/28/2010	10:35:53 AM	PH3 valve closed
5/28/2010	10:35:53 AM	SiCl4 pre valve closed
5/28/2010	10:35:53 AM	SiCl4 post valve closed
5/28/2010	10:35:53 AM	Main Vac valve closed
5/28/2010	10:35:53 AM	Bubbler valve closed
5/28/2010	10:35:53 AM	Bypass valve opened
5/28/2010	10:35:53 AM	Helium MFC set to  0.000000
5/28/2010	10:35:53 AM	H2 MFC set to  0.000000
5/28/2010	10:35:53 AM	BCl3 MFC set to  0.000000
5/28/2010	10:35:53 AM	PHl3 MFC set to  0.000000
5/28/2010	10:35:53 AM	SiCl4 MFC set to  0.000000
5/28/2010	10:35:53 AM	Bypass solenoid MFC set to  0.000000
5/28/2010	10:35:53 AM	Tube furnace set to 0
5/28/2010	10:36:40 AM	Helium valve closed
5/28/2010	10:36:40 AM	H2 valve closed
5/28/2010	10:36:40 AM	BCl3 valve closed
5/28/2010	10:36:40 AM	PH3 valve closed
5/28/2010	10:36:40 AM	SiCl4 pre valve closed
5/28/2010	10:36:40 AM	SiCl4 post valve closed
5/28/2010	10:36:40 AM	Bubbler valve closed
5/28/2010	10:36:40 AM	Main Vac valve opened
5/28/2010	10:36:40 AM	Bypass valve opened
5/28/2010	10:36:40 AM	Helium MFC set to  0.000000
5/28/2010	10:36:40 AM	H2 MFC set to  0.000000
5/28/2010	10:36:40 AM	BCl3 MFC set to  0.000000
5/28/2010	10:36:40 AM	PHl3 MFC set to  0.000000
5/28/2010	10:36:40 AM	SiCl4 MFC set to  0.000000
5/28/2010	10:36:40 AM	Bypass solenoid MFC set to  0.000000
5/28/2010	10:36:41 AM	Tube furnace set to 0
5/28/2010	10:36:41 AM	Run finished at 10:36 AM
5/28/2010	10:36:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/28/2010	10:39:24 AM	Recipe started at 10:39 AM
5/28/2010	10:39:24 AM	H2 valve closed
5/28/2010	10:39:24 AM	BCl3 valve closed
5/28/2010	10:39:24 AM	PH3 valve closed
5/28/2010	10:39:24 AM	SiCl4 pre valve closed
5/28/2010	10:39:24 AM	SiCl4 post valve closed
5/28/2010	10:39:24 AM	Main Vac valve closed
5/28/2010	10:39:24 AM	Bypass valve closed
5/28/2010	10:39:24 AM	Bubbler valve closed
5/28/2010	10:39:24 AM	Helium valve opened
5/28/2010	10:39:24 AM	Helium MFC set to  500.000000
5/28/2010	10:39:24 AM	H2 MFC set to  0.000000
5/28/2010	10:39:24 AM	BCl3 MFC set to  0.000000
5/28/2010	10:39:24 AM	PHl3 MFC set to  0.000000
5/28/2010	10:39:24 AM	SiCl4 MFC set to  0.000000
5/28/2010	10:39:24 AM	Bypass solenoid MFC set to  0.000000
5/28/2010	10:39:24 AM	Tube furnace set to 0
5/28/2010	10:40:46 AM	Helium valve closed
5/28/2010	10:40:46 AM	H2 valve closed
5/28/2010	10:40:46 AM	BCl3 valve closed
5/28/2010	10:40:46 AM	PH3 valve closed
5/28/2010	10:40:46 AM	SiCl4 pre valve closed
5/28/2010	10:40:46 AM	SiCl4 post valve closed
5/28/2010	10:40:46 AM	Main Vac valve closed
5/28/2010	10:40:46 AM	Bypass valve closed
5/28/2010	10:40:46 AM	Bubbler valve closed
5/28/2010	10:40:46 AM	Helium MFC set to  0.000000
5/28/2010	10:40:46 AM	H2 MFC set to  0.000000
5/28/2010	10:40:46 AM	BCl3 MFC set to  0.000000
5/28/2010	10:40:46 AM	PHl3 MFC set to  0.000000
5/28/2010	10:40:46 AM	SiCl4 MFC set to  0.000000
5/28/2010	10:40:46 AM	Bypass solenoid MFC set to  0.000000
5/28/2010	10:40:47 AM	Tube furnace set to 0
5/28/2010	10:41:02 AM	Helium valve closed
5/28/2010	10:41:02 AM	H2 valve closed
5/28/2010	10:41:02 AM	BCl3 valve closed
5/28/2010	10:41:02 AM	PH3 valve closed
5/28/2010	10:41:02 AM	SiCl4 pre valve closed
5/28/2010	10:41:02 AM	SiCl4 post valve closed
5/28/2010	10:41:02 AM	Main Vac valve closed
5/28/2010	10:41:02 AM	Bubbler valve closed
5/28/2010	10:41:02 AM	Bypass valve opened
5/28/2010	10:41:02 AM	Helium MFC set to  0.000000
5/28/2010	10:41:02 AM	H2 MFC set to  0.000000
5/28/2010	10:41:02 AM	BCl3 MFC set to  0.000000
5/28/2010	10:41:02 AM	PHl3 MFC set to  0.000000
5/28/2010	10:41:02 AM	SiCl4 MFC set to  0.000000
5/28/2010	10:41:02 AM	Bypass solenoid MFC set to  0.000000
5/28/2010	10:41:02 AM	Tube furnace set to 0
5/28/2010	10:41:35 AM	Helium valve closed
5/28/2010	10:41:35 AM	H2 valve closed
5/28/2010	10:41:35 AM	BCl3 valve closed
5/28/2010	10:41:35 AM	PH3 valve closed
5/28/2010	10:41:35 AM	SiCl4 pre valve closed
5/28/2010	10:41:35 AM	SiCl4 post valve closed
5/28/2010	10:41:35 AM	Bubbler valve closed
5/28/2010	10:41:35 AM	Main Vac valve opened
5/28/2010	10:41:35 AM	Bypass valve opened
5/28/2010	10:41:35 AM	Helium MFC set to  0.000000
5/28/2010	10:41:35 AM	H2 MFC set to  0.000000
5/28/2010	10:41:35 AM	BCl3 MFC set to  0.000000
5/28/2010	10:41:35 AM	PHl3 MFC set to  0.000000
5/28/2010	10:41:35 AM	SiCl4 MFC set to  0.000000
5/28/2010	10:41:35 AM	Bypass solenoid MFC set to  0.000000
5/28/2010	10:41:35 AM	Tube furnace set to 0
5/28/2010	10:46:35 AM	H2 valve closed
5/28/2010	10:46:35 AM	BCl3 valve closed
5/28/2010	10:46:35 AM	PH3 valve closed
5/28/2010	10:46:35 AM	SiCl4 pre valve closed
5/28/2010	10:46:35 AM	SiCl4 post valve closed
5/28/2010	10:46:35 AM	Main Vac valve closed
5/28/2010	10:46:35 AM	Bypass valve closed
5/28/2010	10:46:35 AM	Bubbler valve closed
5/28/2010	10:46:35 AM	Helium valve opened
5/28/2010	10:46:35 AM	Helium MFC set to  500.000000
5/28/2010	10:46:35 AM	H2 MFC set to  0.000000
5/28/2010	10:46:35 AM	BCl3 MFC set to  0.000000
5/28/2010	10:46:35 AM	PHl3 MFC set to  0.000000
5/28/2010	10:46:35 AM	SiCl4 MFC set to  0.000000
5/28/2010	10:46:35 AM	Bypass solenoid MFC set to  0.000000
5/28/2010	10:46:35 AM	Tube furnace set to 0
5/28/2010	10:47:58 AM	Helium valve closed
5/28/2010	10:47:58 AM	H2 valve closed
5/28/2010	10:47:58 AM	BCl3 valve closed
5/28/2010	10:47:58 AM	PH3 valve closed
5/28/2010	10:47:58 AM	SiCl4 pre valve closed
5/28/2010	10:47:58 AM	SiCl4 post valve closed
5/28/2010	10:47:58 AM	Main Vac valve closed
5/28/2010	10:47:58 AM	Bypass valve closed
5/28/2010	10:47:58 AM	Bubbler valve closed
5/28/2010	10:47:58 AM	Helium MFC set to  0.000000
5/28/2010	10:47:58 AM	H2 MFC set to  0.000000
5/28/2010	10:47:58 AM	BCl3 MFC set to  0.000000
5/28/2010	10:47:58 AM	PHl3 MFC set to  0.000000
5/28/2010	10:47:58 AM	SiCl4 MFC set to  0.000000
5/28/2010	10:47:58 AM	Bypass solenoid MFC set to  0.000000
5/28/2010	10:47:58 AM	Tube furnace set to 0
5/28/2010	10:48:13 AM	Helium valve closed
5/28/2010	10:48:13 AM	H2 valve closed
5/28/2010	10:48:13 AM	BCl3 valve closed
5/28/2010	10:48:13 AM	PH3 valve closed
5/28/2010	10:48:13 AM	SiCl4 pre valve closed
5/28/2010	10:48:13 AM	SiCl4 post valve closed
5/28/2010	10:48:13 AM	Main Vac valve closed
5/28/2010	10:48:13 AM	Bubbler valve closed
5/28/2010	10:48:13 AM	Bypass valve opened
5/28/2010	10:48:13 AM	Helium MFC set to  0.000000
5/28/2010	10:48:13 AM	H2 MFC set to  0.000000
5/28/2010	10:48:13 AM	BCl3 MFC set to  0.000000
5/28/2010	10:48:13 AM	PHl3 MFC set to  0.000000
5/28/2010	10:48:13 AM	SiCl4 MFC set to  0.000000
5/28/2010	10:48:13 AM	Bypass solenoid MFC set to  0.000000
5/28/2010	10:48:13 AM	Tube furnace set to 0
5/28/2010	10:48:47 AM	Helium valve closed
5/28/2010	10:48:47 AM	H2 valve closed
5/28/2010	10:48:47 AM	BCl3 valve closed
5/28/2010	10:48:47 AM	PH3 valve closed
5/28/2010	10:48:47 AM	SiCl4 pre valve closed
5/28/2010	10:48:47 AM	SiCl4 post valve closed
5/28/2010	10:48:47 AM	Bubbler valve closed
5/28/2010	10:48:47 AM	Main Vac valve opened
5/28/2010	10:48:47 AM	Bypass valve opened
5/28/2010	10:48:47 AM	Helium MFC set to  0.000000
5/28/2010	10:48:47 AM	H2 MFC set to  0.000000
5/28/2010	10:48:47 AM	BCl3 MFC set to  0.000000
5/28/2010	10:48:47 AM	PHl3 MFC set to  0.000000
5/28/2010	10:48:47 AM	SiCl4 MFC set to  0.000000
5/28/2010	10:48:47 AM	Bypass solenoid MFC set to  0.000000
5/28/2010	10:48:47 AM	Tube furnace set to 0
5/28/2010	10:53:47 AM	H2 valve closed
5/28/2010	10:53:47 AM	BCl3 valve closed
5/28/2010	10:53:47 AM	PH3 valve closed
5/28/2010	10:53:47 AM	SiCl4 pre valve closed
5/28/2010	10:53:47 AM	SiCl4 post valve closed
5/28/2010	10:53:47 AM	Main Vac valve closed
5/28/2010	10:53:47 AM	Bypass valve closed
5/28/2010	10:53:47 AM	Bubbler valve closed
5/28/2010	10:53:47 AM	Helium valve opened
5/28/2010	10:53:47 AM	Helium MFC set to  500.000000
5/28/2010	10:53:47 AM	H2 MFC set to  0.000000
5/28/2010	10:53:47 AM	BCl3 MFC set to  0.000000
5/28/2010	10:53:47 AM	PHl3 MFC set to  0.000000
5/28/2010	10:53:47 AM	SiCl4 MFC set to  0.000000
5/28/2010	10:53:47 AM	Bypass solenoid MFC set to  0.000000
5/28/2010	10:53:47 AM	Tube furnace set to 0
5/28/2010	10:55:09 AM	Helium valve closed
5/28/2010	10:55:09 AM	H2 valve closed
5/28/2010	10:55:09 AM	BCl3 valve closed
5/28/2010	10:55:09 AM	PH3 valve closed
5/28/2010	10:55:09 AM	SiCl4 pre valve closed
5/28/2010	10:55:09 AM	SiCl4 post valve closed
5/28/2010	10:55:09 AM	Main Vac valve closed
5/28/2010	10:55:09 AM	Bypass valve closed
5/28/2010	10:55:09 AM	Bubbler valve closed
5/28/2010	10:55:09 AM	Helium MFC set to  0.000000
5/28/2010	10:55:09 AM	H2 MFC set to  0.000000
5/28/2010	10:55:09 AM	BCl3 MFC set to  0.000000
5/28/2010	10:55:09 AM	PHl3 MFC set to  0.000000
5/28/2010	10:55:09 AM	SiCl4 MFC set to  0.000000
5/28/2010	10:55:09 AM	Bypass solenoid MFC set to  0.000000
5/28/2010	10:55:10 AM	Tube furnace set to 0
5/28/2010	10:55:25 AM	Helium valve closed
5/28/2010	10:55:25 AM	H2 valve closed
5/28/2010	10:55:25 AM	BCl3 valve closed
5/28/2010	10:55:25 AM	PH3 valve closed
5/28/2010	10:55:25 AM	SiCl4 pre valve closed
5/28/2010	10:55:25 AM	SiCl4 post valve closed
5/28/2010	10:55:25 AM	Main Vac valve closed
5/28/2010	10:55:25 AM	Bubbler valve closed
5/28/2010	10:55:25 AM	Bypass valve opened
5/28/2010	10:55:25 AM	Helium MFC set to  0.000000
5/28/2010	10:55:25 AM	H2 MFC set to  0.000000
5/28/2010	10:55:25 AM	BCl3 MFC set to  0.000000
5/28/2010	10:55:25 AM	PHl3 MFC set to  0.000000
5/28/2010	10:55:25 AM	SiCl4 MFC set to  0.000000
5/28/2010	10:55:25 AM	Bypass solenoid MFC set to  0.000000
5/28/2010	10:55:25 AM	Tube furnace set to 0
5/28/2010	10:55:58 AM	Helium valve closed
5/28/2010	10:55:58 AM	H2 valve closed
5/28/2010	10:55:58 AM	BCl3 valve closed
5/28/2010	10:55:58 AM	PH3 valve closed
5/28/2010	10:55:58 AM	SiCl4 pre valve closed
5/28/2010	10:55:58 AM	SiCl4 post valve closed
5/28/2010	10:55:58 AM	Bubbler valve closed
5/28/2010	10:55:58 AM	Main Vac valve opened
5/28/2010	10:55:58 AM	Bypass valve opened
5/28/2010	10:55:58 AM	Helium MFC set to  0.000000
5/28/2010	10:55:58 AM	H2 MFC set to  0.000000
5/28/2010	10:55:58 AM	BCl3 MFC set to  0.000000
5/28/2010	10:55:58 AM	PHl3 MFC set to  0.000000
5/28/2010	10:55:58 AM	SiCl4 MFC set to  0.000000
5/28/2010	10:55:58 AM	Bypass solenoid MFC set to  0.000000
5/28/2010	10:55:58 AM	Tube furnace set to 0
5/28/2010	11:00:58 AM	Helium valve closed
5/28/2010	11:00:58 AM	H2 valve closed
5/28/2010	11:00:58 AM	BCl3 valve closed
5/28/2010	11:00:58 AM	PH3 valve closed
5/28/2010	11:00:58 AM	SiCl4 pre valve closed
5/28/2010	11:00:58 AM	SiCl4 post valve closed
5/28/2010	11:00:58 AM	Bubbler valve closed
5/28/2010	11:00:58 AM	Main Vac valve opened
5/28/2010	11:00:58 AM	Bypass valve opened
5/28/2010	11:00:58 AM	Helium MFC set to  0.000000
5/28/2010	11:00:58 AM	H2 MFC set to  0.000000
5/28/2010	11:00:58 AM	BCl3 MFC set to  0.000000
5/28/2010	11:00:58 AM	PHl3 MFC set to  0.000000
5/28/2010	11:00:58 AM	SiCl4 MFC set to  0.000000
5/28/2010	11:00:58 AM	Bypass solenoid MFC set to  0.000000
5/28/2010	11:00:58 AM	Tube furnace set to 0
5/28/2010	11:00:59 AM	Run finished at 11:00 AM
5/28/2010	11:13:57 AM	Helium valve opened
5/28/2010	11:14:06 AM	Helium MFC set to  10.000000
5/28/2010	11:15:12 AM	Helium MFC set to  100.000000
5/28/2010	11:15:26 AM	Helium MFC set to  500.000000
5/28/2010	11:15:41 AM	Helium valve closed
5/28/2010	11:15:44 AM	Helium MFC set to  0.000000
5/28/2010	11:16:47 AM	Helium valve opened
5/28/2010	11:16:49 AM	Helium MFC set to  10.000000
5/28/2010	11:16:56 AM	Helium MFC set to  100.000000
5/28/2010	11:17:02 AM	Helium MFC set to  500.000000
5/28/2010	11:17:54 AM	Helium MFC set to  0.000000
5/28/2010	11:17:55 AM	Helium valve closed
5/28/2010	11:19:08 AM	Helium MFC set to  10.000000
5/28/2010	11:19:09 AM	Helium valve opened
5/28/2010	11:19:17 AM	Helium MFC set to  20.000000
5/28/2010	11:19:23 AM	Helium MFC set to  50.000000
5/28/2010	11:19:29 AM	Helium MFC set to  100.000000
5/28/2010	11:19:40 AM	Helium MFC set to  500.000000
5/28/2010	11:20:10 AM	Helium valve closed
5/28/2010	11:20:12 AM	Helium MFC set to  0.000000
5/28/2010	11:21:05 AM	Bypass valve closed
5/28/2010	11:21:06 AM	Main Vac valve closed
5/28/2010	11:21:19 AM	Main Vac valve opened
5/28/2010	11:21:20 AM	Bypass valve opened
5/28/2010	11:24:34 AM	Recipe started at 11:24 AM
5/28/2010	11:24:34 AM	Helium valve closed
5/28/2010	11:24:34 AM	BCl3 valve closed
5/28/2010	11:24:34 AM	PH3 valve closed
5/28/2010	11:24:34 AM	SiCl4 pre valve closed
5/28/2010	11:24:34 AM	SiCl4 post valve closed
5/28/2010	11:24:34 AM	Main Vac valve closed
5/28/2010	11:24:34 AM	Bypass valve closed
5/28/2010	11:24:34 AM	Bubbler valve closed
5/28/2010	11:24:34 AM	H2 valve opened
5/28/2010	11:24:34 AM	Helium MFC set to  0.000000
5/28/2010	11:24:34 AM	H2 MFC set to  500.000000
5/28/2010	11:24:34 AM	BCl3 MFC set to  0.000000
5/28/2010	11:24:34 AM	PHl3 MFC set to  0.000000
5/28/2010	11:24:34 AM	SiCl4 MFC set to  0.000000
5/28/2010	11:24:34 AM	Bypass solenoid MFC set to  0.000000
5/28/2010	11:24:34 AM	Tube furnace set to 0
5/28/2010	11:25:57 AM	Helium valve closed
5/28/2010	11:25:57 AM	BCl3 valve closed
5/28/2010	11:25:57 AM	PH3 valve closed
5/28/2010	11:25:57 AM	SiCl4 pre valve closed
5/28/2010	11:25:57 AM	SiCl4 post valve closed
5/28/2010	11:25:57 AM	Main Vac valve closed
5/28/2010	11:25:57 AM	Bypass valve closed
5/28/2010	11:25:57 AM	H2 valve opened
5/28/2010	11:25:57 AM	Bubbler valve opened
5/28/2010	11:25:57 AM	Helium MFC set to  0.000000
5/28/2010	11:25:57 AM	H2 MFC set to  500.000000
5/28/2010	11:25:57 AM	BCl3 MFC set to  0.000000
5/28/2010	11:25:57 AM	PHl3 MFC set to  0.000000
5/28/2010	11:25:57 AM	SiCl4 MFC set to  0.000000
5/28/2010	11:25:57 AM	Bypass solenoid MFC set to  0.000000
5/28/2010	11:25:57 AM	Tube furnace set to 1000
5/28/2010	11:45:57 AM	Helium valve closed
5/28/2010	11:45:57 AM	PH3 valve closed
5/28/2010	11:45:57 AM	Main Vac valve closed
5/28/2010	11:45:57 AM	Bypass valve closed
5/28/2010	11:45:57 AM	H2 valve opened
5/28/2010	11:45:57 AM	BCl3 valve opened
5/28/2010	11:45:57 AM	SiCl4 pre valve opened
5/28/2010	11:45:57 AM	SiCl4 post valve opened
5/28/2010	11:45:57 AM	Bubbler valve opened
5/28/2010	11:45:57 AM	Helium MFC set to  0.000000
5/28/2010	11:45:57 AM	H2 MFC set to  500.000000
5/28/2010	11:45:57 AM	BCl3 MFC set to  35.000000
5/28/2010	11:45:57 AM	PHl3 MFC set to  0.000000
5/28/2010	11:45:57 AM	SiCl4 MFC set to  50.000000
5/28/2010	11:45:57 AM	Bypass solenoid MFC set to  0.000000
5/28/2010	11:45:57 AM	Tube furnace set to 1000
5/28/2010	12:05:57 PM	H2 valve closed
5/28/2010	12:05:57 PM	BCl3 valve closed
5/28/2010	12:05:57 PM	PH3 valve closed
5/28/2010	12:05:57 PM	SiCl4 pre valve closed
5/28/2010	12:05:57 PM	SiCl4 post valve closed
5/28/2010	12:05:57 PM	Main Vac valve closed
5/28/2010	12:05:57 PM	Bypass valve closed
5/28/2010	12:05:57 PM	Helium valve opened
5/28/2010	12:05:57 PM	Bubbler valve opened
5/28/2010	12:05:57 PM	Helium MFC set to  500.000000
5/28/2010	12:05:57 PM	H2 MFC set to  0.000000
5/28/2010	12:05:57 PM	BCl3 MFC set to  0.000000
5/28/2010	12:05:57 PM	PHl3 MFC set to  0.000000
5/28/2010	12:05:57 PM	SiCl4 MFC set to  0.000000
5/28/2010	12:05:57 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	12:05:58 PM	Tube furnace set to 0
5/28/2010	12:25:57 PM	Helium valve closed
5/28/2010	12:25:57 PM	H2 valve closed
5/28/2010	12:25:57 PM	BCl3 valve closed
5/28/2010	12:25:58 PM	PH3 valve closed
5/28/2010	12:25:58 PM	SiCl4 pre valve closed
5/28/2010	12:25:58 PM	SiCl4 post valve closed
5/28/2010	12:25:58 PM	Main Vac valve closed
5/28/2010	12:25:58 PM	Bypass valve closed
5/28/2010	12:25:58 PM	Bubbler valve closed
5/28/2010	12:25:58 PM	Helium MFC set to  0.000000
5/28/2010	12:25:58 PM	H2 MFC set to  0.000000
5/28/2010	12:25:58 PM	BCl3 MFC set to  0.000000
5/28/2010	12:25:58 PM	PHl3 MFC set to  0.000000
5/28/2010	12:25:58 PM	SiCl4 MFC set to  0.000000
5/28/2010	12:25:58 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	12:25:58 PM	Tube furnace set to 0
5/28/2010	12:25:58 PM	Run finished at 12:25 PM
5/28/2010	12:51:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/28/2010	12:51:05 PM	Recipe started at 12:51 PM
5/28/2010	12:51:05 PM	H2 valve closed
5/28/2010	12:51:05 PM	BCl3 valve closed
5/28/2010	12:51:05 PM	PH3 valve closed
5/28/2010	12:51:05 PM	SiCl4 pre valve closed
5/28/2010	12:51:05 PM	SiCl4 post valve closed
5/28/2010	12:51:05 PM	Main Vac valve closed
5/28/2010	12:51:05 PM	Bypass valve closed
5/28/2010	12:51:05 PM	Bubbler valve closed
5/28/2010	12:51:05 PM	Helium valve opened
5/28/2010	12:51:05 PM	Helium MFC set to  500.000000
5/28/2010	12:51:05 PM	H2 MFC set to  0.000000
5/28/2010	12:51:05 PM	BCl3 MFC set to  0.000000
5/28/2010	12:51:05 PM	PHl3 MFC set to  0.000000
5/28/2010	12:51:05 PM	SiCl4 MFC set to  0.000000
5/28/2010	12:51:05 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	12:51:05 PM	Tube furnace set to 0
5/28/2010	12:51:07 PM	Helium valve closed
5/28/2010	12:51:07 PM	H2 valve closed
5/28/2010	12:51:07 PM	BCl3 valve closed
5/28/2010	12:51:07 PM	PH3 valve closed
5/28/2010	12:51:07 PM	SiCl4 pre valve closed
5/28/2010	12:51:07 PM	SiCl4 post valve closed
5/28/2010	12:51:07 PM	Main Vac valve closed
5/28/2010	12:51:07 PM	Bypass valve closed
5/28/2010	12:51:07 PM	Bubbler valve closed
5/28/2010	12:51:07 PM	Helium MFC set to  0.000000
5/28/2010	12:51:07 PM	H2 MFC set to  0.000000
5/28/2010	12:51:07 PM	BCl3 MFC set to  0.000000
5/28/2010	12:51:07 PM	PHl3 MFC set to  0.000000
5/28/2010	12:51:07 PM	SiCl4 MFC set to  0.000000
5/28/2010	12:51:07 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	12:51:08 PM	Tube furnace set to 0
5/28/2010	12:51:08 PM	Run finished at 12:51 PM
5/28/2010	12:51:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/28/2010	1:06:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/28/2010	1:06:05 PM	Recipe started at 1:06 PM
5/28/2010	1:06:05 PM	Helium valve closed
5/28/2010	1:06:05 PM	H2 valve closed
5/28/2010	1:06:05 PM	BCl3 valve closed
5/28/2010	1:06:05 PM	PH3 valve closed
5/28/2010	1:06:05 PM	SiCl4 pre valve closed
5/28/2010	1:06:05 PM	SiCl4 post valve closed
5/28/2010	1:06:05 PM	Main Vac valve closed
5/28/2010	1:06:05 PM	Bubbler valve closed
5/28/2010	1:06:05 PM	Bypass valve opened
5/28/2010	1:06:05 PM	Helium MFC set to  0.000000
5/28/2010	1:06:05 PM	H2 MFC set to  0.000000
5/28/2010	1:06:05 PM	BCl3 MFC set to  0.000000
5/28/2010	1:06:05 PM	PHl3 MFC set to  0.000000
5/28/2010	1:06:05 PM	SiCl4 MFC set to  0.000000
5/28/2010	1:06:05 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	1:06:05 PM	Tube furnace set to 0
5/28/2010	1:06:54 PM	Helium valve closed
5/28/2010	1:06:54 PM	H2 valve closed
5/28/2010	1:06:54 PM	BCl3 valve closed
5/28/2010	1:06:54 PM	PH3 valve closed
5/28/2010	1:06:54 PM	SiCl4 pre valve closed
5/28/2010	1:06:54 PM	SiCl4 post valve closed
5/28/2010	1:06:54 PM	Bubbler valve closed
5/28/2010	1:06:54 PM	Main Vac valve opened
5/28/2010	1:06:54 PM	Bypass valve opened
5/28/2010	1:06:54 PM	Helium MFC set to  0.000000
5/28/2010	1:06:54 PM	H2 MFC set to  0.000000
5/28/2010	1:06:54 PM	BCl3 MFC set to  0.000000
5/28/2010	1:06:54 PM	PHl3 MFC set to  0.000000
5/28/2010	1:06:54 PM	SiCl4 MFC set to  0.000000
5/28/2010	1:06:54 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	1:06:54 PM	Tube furnace set to 0
5/28/2010	1:06:54 PM	Run finished at 1:06 PM
5/28/2010	1:06:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/28/2010	1:09:57 PM	Recipe started at 1:09 PM
5/28/2010	1:09:57 PM	Helium valve closed
5/28/2010	1:09:57 PM	H2 valve closed
5/28/2010	1:09:57 PM	BCl3 valve closed
5/28/2010	1:09:57 PM	PH3 valve closed
5/28/2010	1:09:57 PM	SiCl4 pre valve closed
5/28/2010	1:09:57 PM	SiCl4 post valve closed
5/28/2010	1:09:57 PM	Main Vac valve closed
5/28/2010	1:09:57 PM	Bypass valve closed
5/28/2010	1:09:57 PM	Bubbler valve closed
5/28/2010	1:09:57 PM	Helium MFC set to  0.000000
5/28/2010	1:09:57 PM	H2 MFC set to  500.000000
5/28/2010	1:09:57 PM	BCl3 MFC set to  50.000000
5/28/2010	1:09:57 PM	PHl3 MFC set to  0.000000
5/28/2010	1:09:57 PM	Error setting the  SiCl4 MFC to 325.000000
5/28/2010	1:10:11 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	1:10:12 PM	Tube furnace set to 0
5/28/2010	1:10:15 PM	Run aborted at 1:10 PM
5/28/2010	1:10:15 PM	Helium valve closed
5/28/2010	1:10:15 PM	H2 valve closed
5/28/2010	1:10:15 PM	BCl3 valve closed
5/28/2010	1:10:15 PM	PH3 valve closed
5/28/2010	1:10:15 PM	SiCl4 pre valve closed
5/28/2010	1:10:15 PM	SiCl4 post valve closed
5/28/2010	1:10:15 PM	Bypass valve closed
5/28/2010	1:10:15 PM	Main Vac valve closed
5/28/2010	1:10:15 PM	Bubbler valve closed
5/28/2010	1:10:15 PM	Helium MFC set to  0.000000
5/28/2010	1:10:15 PM	H2 MFC set to  0.000000
5/28/2010	1:10:15 PM	BCl3 MFC set to  0.000000
5/28/2010	1:10:15 PM	PHl3 MFC set to  0.000000
5/28/2010	1:10:15 PM	SiCl4 MFC set to  0.000000
5/28/2010	1:10:15 PM	Tube furnace set to 0
5/28/2010	1:10:25 PM	Bypass valve opened
5/28/2010	1:10:25 PM	Main Vac valve opened
5/28/2010	1:10:26 PM	Bypass valve closed
5/28/2010	1:10:27 PM	Main Vac valve closed
5/28/2010	1:10:27 PM	Main Vac valve opened
5/28/2010	1:10:28 PM	Bypass valve opened
5/28/2010	1:10:32 PM	Recipe started at 1:10 PM
5/28/2010	1:10:32 PM	Helium valve closed
5/28/2010	1:10:32 PM	H2 valve closed
5/28/2010	1:10:32 PM	BCl3 valve closed
5/28/2010	1:10:32 PM	PH3 valve closed
5/28/2010	1:10:32 PM	SiCl4 pre valve closed
5/28/2010	1:10:32 PM	SiCl4 post valve closed
5/28/2010	1:10:32 PM	Bubbler valve closed
5/28/2010	1:10:32 PM	Main Vac valve opened
5/28/2010	1:10:32 PM	Bypass valve opened
5/28/2010	1:10:32 PM	Helium MFC set to  0.000000
5/28/2010	1:10:32 PM	H2 MFC set to  500.000000
5/28/2010	1:10:32 PM	BCl3 MFC set to  50.000000
5/28/2010	1:10:32 PM	PHl3 MFC set to  0.000000
5/28/2010	1:10:32 PM	Error setting the  SiCl4 MFC to 325.000000
5/28/2010	1:10:33 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	1:10:33 PM	Tube furnace set to 0
5/28/2010	1:10:35 PM	Run finished at 1:10 PM
5/28/2010	1:11:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/28/2010	1:11:12 PM	Recipe started at 1:11 PM
5/28/2010	1:11:12 PM	H2 valve closed
5/28/2010	1:11:12 PM	BCl3 valve closed
5/28/2010	1:11:12 PM	PH3 valve closed
5/28/2010	1:11:12 PM	SiCl4 pre valve closed
5/28/2010	1:11:12 PM	SiCl4 post valve closed
5/28/2010	1:11:12 PM	Main Vac valve closed
5/28/2010	1:11:12 PM	Bypass valve closed
5/28/2010	1:11:12 PM	Bubbler valve closed
5/28/2010	1:11:12 PM	Helium valve opened
5/28/2010	1:11:12 PM	Helium MFC set to  500.000000
5/28/2010	1:11:12 PM	H2 MFC set to  0.000000
5/28/2010	1:11:12 PM	BCl3 MFC set to  0.000000
5/28/2010	1:11:12 PM	PHl3 MFC set to  0.000000
5/28/2010	1:11:12 PM	SiCl4 MFC set to  0.000000
5/28/2010	1:11:12 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	1:11:12 PM	Tube furnace set to 0
5/28/2010	1:12:32 PM	Helium valve closed
5/28/2010	1:12:32 PM	H2 valve closed
5/28/2010	1:12:32 PM	BCl3 valve closed
5/28/2010	1:12:32 PM	PH3 valve closed
5/28/2010	1:12:32 PM	SiCl4 pre valve closed
5/28/2010	1:12:32 PM	SiCl4 post valve closed
5/28/2010	1:12:32 PM	Main Vac valve closed
5/28/2010	1:12:32 PM	Bypass valve closed
5/28/2010	1:12:32 PM	Bubbler valve closed
5/28/2010	1:12:32 PM	Helium MFC set to  0.000000
5/28/2010	1:12:32 PM	H2 MFC set to  0.000000
5/28/2010	1:12:32 PM	BCl3 MFC set to  0.000000
5/28/2010	1:12:32 PM	PHl3 MFC set to  0.000000
5/28/2010	1:12:32 PM	SiCl4 MFC set to  0.000000
5/28/2010	1:12:32 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	1:12:32 PM	Tube furnace set to 0
5/28/2010	1:12:47 PM	Helium valve closed
5/28/2010	1:12:47 PM	H2 valve closed
5/28/2010	1:12:47 PM	BCl3 valve closed
5/28/2010	1:12:47 PM	PH3 valve closed
5/28/2010	1:12:47 PM	SiCl4 pre valve closed
5/28/2010	1:12:47 PM	SiCl4 post valve closed
5/28/2010	1:12:47 PM	Main Vac valve closed
5/28/2010	1:12:47 PM	Bubbler valve closed
5/28/2010	1:12:47 PM	Bypass valve opened
5/28/2010	1:12:47 PM	Helium MFC set to  0.000000
5/28/2010	1:12:47 PM	H2 MFC set to  0.000000
5/28/2010	1:12:47 PM	BCl3 MFC set to  0.000000
5/28/2010	1:12:47 PM	PHl3 MFC set to  0.000000
5/28/2010	1:12:47 PM	SiCl4 MFC set to  0.000000
5/28/2010	1:12:47 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	1:12:47 PM	Tube furnace set to 0
5/28/2010	1:13:20 PM	Helium valve closed
5/28/2010	1:13:20 PM	H2 valve closed
5/28/2010	1:13:20 PM	BCl3 valve closed
5/28/2010	1:13:20 PM	PH3 valve closed
5/28/2010	1:13:20 PM	SiCl4 pre valve closed
5/28/2010	1:13:20 PM	SiCl4 post valve closed
5/28/2010	1:13:20 PM	Bubbler valve closed
5/28/2010	1:13:20 PM	Main Vac valve opened
5/28/2010	1:13:20 PM	Bypass valve opened
5/28/2010	1:13:20 PM	Helium MFC set to  0.000000
5/28/2010	1:13:20 PM	H2 MFC set to  0.000000
5/28/2010	1:13:20 PM	BCl3 MFC set to  0.000000
5/28/2010	1:13:20 PM	PHl3 MFC set to  0.000000
5/28/2010	1:13:20 PM	SiCl4 MFC set to  0.000000
5/28/2010	1:13:20 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	1:13:21 PM	Tube furnace set to 0
5/28/2010	1:18:21 PM	H2 valve closed
5/28/2010	1:18:21 PM	BCl3 valve closed
5/28/2010	1:18:21 PM	PH3 valve closed
5/28/2010	1:18:21 PM	SiCl4 pre valve closed
5/28/2010	1:18:21 PM	SiCl4 post valve closed
5/28/2010	1:18:21 PM	Main Vac valve closed
5/28/2010	1:18:21 PM	Bypass valve closed
5/28/2010	1:18:21 PM	Bubbler valve closed
5/28/2010	1:18:21 PM	Helium valve opened
5/28/2010	1:18:21 PM	Helium MFC set to  500.000000
5/28/2010	1:18:21 PM	H2 MFC set to  0.000000
5/28/2010	1:18:21 PM	BCl3 MFC set to  0.000000
5/28/2010	1:18:21 PM	PHl3 MFC set to  0.000000
5/28/2010	1:18:21 PM	SiCl4 MFC set to  0.000000
5/28/2010	1:18:21 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	1:18:21 PM	Tube furnace set to 0
5/28/2010	1:19:41 PM	Helium valve closed
5/28/2010	1:19:41 PM	H2 valve closed
5/28/2010	1:19:41 PM	BCl3 valve closed
5/28/2010	1:19:41 PM	PH3 valve closed
5/28/2010	1:19:41 PM	SiCl4 pre valve closed
5/28/2010	1:19:41 PM	SiCl4 post valve closed
5/28/2010	1:19:41 PM	Main Vac valve closed
5/28/2010	1:19:41 PM	Bypass valve closed
5/28/2010	1:19:41 PM	Bubbler valve closed
5/28/2010	1:19:41 PM	Helium MFC set to  0.000000
5/28/2010	1:19:41 PM	H2 MFC set to  0.000000
5/28/2010	1:19:41 PM	BCl3 MFC set to  0.000000
5/28/2010	1:19:41 PM	PHl3 MFC set to  0.000000
5/28/2010	1:19:41 PM	SiCl4 MFC set to  0.000000
5/28/2010	1:19:41 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	1:19:41 PM	Tube furnace set to 0
5/28/2010	1:19:56 PM	Helium valve closed
5/28/2010	1:19:56 PM	H2 valve closed
5/28/2010	1:19:56 PM	BCl3 valve closed
5/28/2010	1:19:56 PM	PH3 valve closed
5/28/2010	1:19:56 PM	SiCl4 pre valve closed
5/28/2010	1:19:56 PM	SiCl4 post valve closed
5/28/2010	1:19:56 PM	Main Vac valve closed
5/28/2010	1:19:56 PM	Bubbler valve closed
5/28/2010	1:19:56 PM	Bypass valve opened
5/28/2010	1:19:56 PM	Helium MFC set to  0.000000
5/28/2010	1:19:56 PM	H2 MFC set to  0.000000
5/28/2010	1:19:56 PM	BCl3 MFC set to  0.000000
5/28/2010	1:19:56 PM	PHl3 MFC set to  0.000000
5/28/2010	1:19:56 PM	SiCl4 MFC set to  0.000000
5/28/2010	1:19:56 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	1:19:56 PM	Tube furnace set to 0
5/28/2010	1:20:29 PM	Helium valve closed
5/28/2010	1:20:29 PM	H2 valve closed
5/28/2010	1:20:29 PM	BCl3 valve closed
5/28/2010	1:20:29 PM	PH3 valve closed
5/28/2010	1:20:29 PM	SiCl4 pre valve closed
5/28/2010	1:20:29 PM	SiCl4 post valve closed
5/28/2010	1:20:29 PM	Bubbler valve closed
5/28/2010	1:20:29 PM	Main Vac valve opened
5/28/2010	1:20:29 PM	Bypass valve opened
5/28/2010	1:20:29 PM	Helium MFC set to  0.000000
5/28/2010	1:20:29 PM	H2 MFC set to  0.000000
5/28/2010	1:20:29 PM	BCl3 MFC set to  0.000000
5/28/2010	1:20:29 PM	PHl3 MFC set to  0.000000
5/28/2010	1:20:29 PM	SiCl4 MFC set to  0.000000
5/28/2010	1:20:29 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	1:20:29 PM	Tube furnace set to 0
5/28/2010	1:25:29 PM	H2 valve closed
5/28/2010	1:25:29 PM	BCl3 valve closed
5/28/2010	1:25:29 PM	PH3 valve closed
5/28/2010	1:25:29 PM	SiCl4 pre valve closed
5/28/2010	1:25:29 PM	SiCl4 post valve closed
5/28/2010	1:25:29 PM	Main Vac valve closed
5/28/2010	1:25:29 PM	Bypass valve closed
5/28/2010	1:25:29 PM	Bubbler valve closed
5/28/2010	1:25:29 PM	Helium valve opened
5/28/2010	1:25:29 PM	Helium MFC set to  500.000000
5/28/2010	1:25:29 PM	H2 MFC set to  0.000000
5/28/2010	1:25:29 PM	BCl3 MFC set to  0.000000
5/28/2010	1:25:29 PM	PHl3 MFC set to  0.000000
5/28/2010	1:25:29 PM	SiCl4 MFC set to  0.000000
5/28/2010	1:25:29 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	1:25:29 PM	Tube furnace set to 0
5/28/2010	1:26:49 PM	Helium valve closed
5/28/2010	1:26:49 PM	H2 valve closed
5/28/2010	1:26:49 PM	BCl3 valve closed
5/28/2010	1:26:49 PM	PH3 valve closed
5/28/2010	1:26:49 PM	SiCl4 pre valve closed
5/28/2010	1:26:49 PM	SiCl4 post valve closed
5/28/2010	1:26:49 PM	Main Vac valve closed
5/28/2010	1:26:49 PM	Bypass valve closed
5/28/2010	1:26:49 PM	Bubbler valve closed
5/28/2010	1:26:49 PM	Helium MFC set to  0.000000
5/28/2010	1:26:49 PM	H2 MFC set to  0.000000
5/28/2010	1:26:49 PM	BCl3 MFC set to  0.000000
5/28/2010	1:26:49 PM	PHl3 MFC set to  0.000000
5/28/2010	1:26:49 PM	SiCl4 MFC set to  0.000000
5/28/2010	1:26:49 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	1:26:49 PM	Tube furnace set to 0
5/28/2010	1:27:04 PM	Helium valve closed
5/28/2010	1:27:04 PM	H2 valve closed
5/28/2010	1:27:04 PM	BCl3 valve closed
5/28/2010	1:27:04 PM	PH3 valve closed
5/28/2010	1:27:04 PM	SiCl4 pre valve closed
5/28/2010	1:27:04 PM	SiCl4 post valve closed
5/28/2010	1:27:04 PM	Main Vac valve closed
5/28/2010	1:27:04 PM	Bubbler valve closed
5/28/2010	1:27:04 PM	Bypass valve opened
5/28/2010	1:27:04 PM	Helium MFC set to  0.000000
5/28/2010	1:27:04 PM	H2 MFC set to  0.000000
5/28/2010	1:27:04 PM	BCl3 MFC set to  0.000000
5/28/2010	1:27:04 PM	PHl3 MFC set to  0.000000
5/28/2010	1:27:04 PM	SiCl4 MFC set to  0.000000
5/28/2010	1:27:04 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	1:27:04 PM	Tube furnace set to 0
5/28/2010	1:27:37 PM	Helium valve closed
5/28/2010	1:27:37 PM	H2 valve closed
5/28/2010	1:27:37 PM	BCl3 valve closed
5/28/2010	1:27:37 PM	PH3 valve closed
5/28/2010	1:27:37 PM	SiCl4 pre valve closed
5/28/2010	1:27:37 PM	SiCl4 post valve closed
5/28/2010	1:27:37 PM	Bubbler valve closed
5/28/2010	1:27:37 PM	Main Vac valve opened
5/28/2010	1:27:37 PM	Bypass valve opened
5/28/2010	1:27:37 PM	Helium MFC set to  0.000000
5/28/2010	1:27:37 PM	H2 MFC set to  0.000000
5/28/2010	1:27:37 PM	BCl3 MFC set to  0.000000
5/28/2010	1:27:37 PM	PHl3 MFC set to  0.000000
5/28/2010	1:27:37 PM	SiCl4 MFC set to  0.000000
5/28/2010	1:27:37 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	1:27:37 PM	Tube furnace set to 0
5/28/2010	1:32:37 PM	Helium valve closed
5/28/2010	1:32:37 PM	H2 valve closed
5/28/2010	1:32:37 PM	BCl3 valve closed
5/28/2010	1:32:37 PM	PH3 valve closed
5/28/2010	1:32:37 PM	SiCl4 pre valve closed
5/28/2010	1:32:37 PM	SiCl4 post valve closed
5/28/2010	1:32:37 PM	Bubbler valve closed
5/28/2010	1:32:37 PM	Main Vac valve opened
5/28/2010	1:32:37 PM	Bypass valve opened
5/28/2010	1:32:37 PM	Helium MFC set to  0.000000
5/28/2010	1:32:37 PM	H2 MFC set to  0.000000
5/28/2010	1:32:37 PM	BCl3 MFC set to  0.000000
5/28/2010	1:32:37 PM	PHl3 MFC set to  0.000000
5/28/2010	1:32:37 PM	SiCl4 MFC set to  0.000000
5/28/2010	1:32:37 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	1:32:37 PM	Tube furnace set to 0
5/28/2010	1:32:38 PM	Run finished at 1:32 PM
5/28/2010	1:32:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/28/2010	2:04:22 PM	Helium valve opened
5/28/2010	2:04:24 PM	Helium MFC set to  50.000000
5/28/2010	2:08:21 PM	Helium MFC set to  500.000000
5/28/2010	2:09:03 PM	Helium valve closed
5/28/2010	2:09:06 PM	Helium MFC set to  0.000000
5/28/2010	2:09:44 PM	Bypass valve closed
5/28/2010	2:09:45 PM	Main Vac valve closed
5/28/2010	2:09:55 PM	Bypass valve opened
5/28/2010	2:09:55 PM	Main Vac valve opened
5/28/2010	2:12:21 PM	Recipe started at 2:12 PM
5/28/2010	2:12:21 PM	Helium valve closed
5/28/2010	2:12:21 PM	BCl3 valve closed
5/28/2010	2:12:21 PM	PH3 valve closed
5/28/2010	2:12:21 PM	SiCl4 pre valve closed
5/28/2010	2:12:21 PM	SiCl4 post valve closed
5/28/2010	2:12:21 PM	Main Vac valve closed
5/28/2010	2:12:21 PM	Bypass valve closed
5/28/2010	2:12:21 PM	Bubbler valve closed
5/28/2010	2:12:21 PM	H2 valve opened
5/28/2010	2:12:21 PM	Helium MFC set to  0.000000
5/28/2010	2:12:21 PM	H2 MFC set to  500.000000
5/28/2010	2:12:21 PM	BCl3 MFC set to  0.000000
5/28/2010	2:12:21 PM	PHl3 MFC set to  0.000000
5/28/2010	2:12:21 PM	SiCl4 MFC set to  0.000000
5/28/2010	2:12:21 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	2:12:21 PM	Tube furnace set to 0
5/28/2010	2:13:42 PM	Helium valve closed
5/28/2010	2:13:42 PM	BCl3 valve closed
5/28/2010	2:13:42 PM	PH3 valve closed
5/28/2010	2:13:42 PM	SiCl4 pre valve closed
5/28/2010	2:13:42 PM	SiCl4 post valve closed
5/28/2010	2:13:42 PM	Main Vac valve closed
5/28/2010	2:13:42 PM	Bypass valve closed
5/28/2010	2:13:42 PM	H2 valve opened
5/28/2010	2:13:42 PM	Bubbler valve opened
5/28/2010	2:13:42 PM	Helium MFC set to  0.000000
5/28/2010	2:13:42 PM	H2 MFC set to  500.000000
5/28/2010	2:13:42 PM	BCl3 MFC set to  0.000000
5/28/2010	2:13:42 PM	PHl3 MFC set to  0.000000
5/28/2010	2:13:42 PM	SiCl4 MFC set to  0.000000
5/28/2010	2:13:42 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	2:13:42 PM	Tube furnace set to 1000
5/28/2010	2:33:42 PM	Helium valve closed
5/28/2010	2:33:42 PM	PH3 valve closed
5/28/2010	2:33:42 PM	Main Vac valve closed
5/28/2010	2:33:42 PM	Bypass valve closed
5/28/2010	2:33:42 PM	H2 valve opened
5/28/2010	2:33:42 PM	BCl3 valve opened
5/28/2010	2:33:42 PM	SiCl4 pre valve opened
5/28/2010	2:33:42 PM	SiCl4 post valve opened
5/28/2010	2:33:42 PM	Bubbler valve opened
5/28/2010	2:33:42 PM	Helium MFC set to  0.000000
5/28/2010	2:33:42 PM	H2 MFC set to  500.000000
5/28/2010	2:33:42 PM	BCl3 MFC set to  35.000000
5/28/2010	2:33:42 PM	PHl3 MFC set to  0.000000
5/28/2010	2:33:42 PM	SiCl4 MFC set to  50.000000
5/28/2010	2:33:42 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	2:33:42 PM	Tube furnace set to 1000
5/28/2010	2:48:42 PM	H2 valve closed
5/28/2010	2:48:42 PM	BCl3 valve closed
5/28/2010	2:48:42 PM	PH3 valve closed
5/28/2010	2:48:42 PM	SiCl4 pre valve closed
5/28/2010	2:48:42 PM	SiCl4 post valve closed
5/28/2010	2:48:42 PM	Main Vac valve closed
5/28/2010	2:48:42 PM	Bypass valve closed
5/28/2010	2:48:42 PM	Helium valve opened
5/28/2010	2:48:42 PM	Bubbler valve opened
5/28/2010	2:48:42 PM	Helium MFC set to  500.000000
5/28/2010	2:48:42 PM	H2 MFC set to  0.000000
5/28/2010	2:48:42 PM	BCl3 MFC set to  0.000000
5/28/2010	2:48:42 PM	PHl3 MFC set to  0.000000
5/28/2010	2:48:42 PM	SiCl4 MFC set to  0.000000
5/28/2010	2:48:42 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	2:48:42 PM	Tube furnace set to 0
5/28/2010	3:08:42 PM	Helium valve closed
5/28/2010	3:08:42 PM	H2 valve closed
5/28/2010	3:08:42 PM	BCl3 valve closed
5/28/2010	3:08:42 PM	PH3 valve closed
5/28/2010	3:08:42 PM	SiCl4 pre valve closed
5/28/2010	3:08:42 PM	SiCl4 post valve closed
5/28/2010	3:08:42 PM	Main Vac valve closed
5/28/2010	3:08:42 PM	Bypass valve closed
5/28/2010	3:08:42 PM	Bubbler valve closed
5/28/2010	3:08:42 PM	Helium MFC set to  0.000000
5/28/2010	3:08:42 PM	H2 MFC set to  0.000000
5/28/2010	3:08:42 PM	BCl3 MFC set to  0.000000
5/28/2010	3:08:42 PM	PHl3 MFC set to  0.000000
5/28/2010	3:08:42 PM	SiCl4 MFC set to  0.000000
5/28/2010	3:08:42 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	3:08:43 PM	Tube furnace set to 0
5/28/2010	3:08:43 PM	Run finished at 3:08 PM
5/28/2010	3:49:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/28/2010	3:49:50 PM	Recipe started at 3:49 PM
5/28/2010	3:49:50 PM	H2 valve closed
5/28/2010	3:49:50 PM	BCl3 valve closed
5/28/2010	3:49:50 PM	PH3 valve closed
5/28/2010	3:49:50 PM	SiCl4 pre valve closed
5/28/2010	3:49:50 PM	SiCl4 post valve closed
5/28/2010	3:49:51 PM	Main Vac valve closed
5/28/2010	3:49:51 PM	Bypass valve closed
5/28/2010	3:49:51 PM	Bubbler valve closed
5/28/2010	3:49:51 PM	Helium valve opened
5/28/2010	3:49:51 PM	Helium MFC set to  500.000000
5/28/2010	3:49:51 PM	H2 MFC set to  0.000000
5/28/2010	3:49:51 PM	BCl3 MFC set to  0.000000
5/28/2010	3:49:51 PM	PHl3 MFC set to  0.000000
5/28/2010	3:49:51 PM	SiCl4 MFC set to  0.000000
5/28/2010	3:49:51 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	3:49:51 PM	Tube furnace set to 0
5/28/2010	3:49:59 PM	Helium valve closed
5/28/2010	3:49:59 PM	H2 valve closed
5/28/2010	3:49:59 PM	BCl3 valve closed
5/28/2010	3:49:59 PM	PH3 valve closed
5/28/2010	3:49:59 PM	SiCl4 pre valve closed
5/28/2010	3:49:59 PM	SiCl4 post valve closed
5/28/2010	3:49:59 PM	Main Vac valve closed
5/28/2010	3:49:59 PM	Bypass valve closed
5/28/2010	3:49:59 PM	Bubbler valve closed
5/28/2010	3:49:59 PM	Helium MFC set to  0.000000
5/28/2010	3:49:59 PM	H2 MFC set to  0.000000
5/28/2010	3:49:59 PM	BCl3 MFC set to  0.000000
5/28/2010	3:49:59 PM	PHl3 MFC set to  0.000000
5/28/2010	3:49:59 PM	SiCl4 MFC set to  0.000000
5/28/2010	3:49:59 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	3:49:59 PM	Tube furnace set to 0
5/28/2010	3:49:59 PM	Run finished at 3:49 PM
5/28/2010	3:49:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/28/2010	4:00:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/28/2010	4:00:29 PM	Recipe started at 4:00 PM
5/28/2010	4:00:29 PM	H2 valve closed
5/28/2010	4:00:29 PM	BCl3 valve closed
5/28/2010	4:00:29 PM	PH3 valve closed
5/28/2010	4:00:29 PM	SiCl4 pre valve closed
5/28/2010	4:00:29 PM	SiCl4 post valve closed
5/28/2010	4:00:29 PM	Main Vac valve closed
5/28/2010	4:00:29 PM	Bypass valve closed
5/28/2010	4:00:30 PM	Bubbler valve closed
5/28/2010	4:00:30 PM	Helium valve opened
5/28/2010	4:00:30 PM	Helium MFC set to  500.000000
5/28/2010	4:00:30 PM	H2 MFC set to  0.000000
5/28/2010	4:00:30 PM	BCl3 MFC set to  0.000000
5/28/2010	4:00:30 PM	PHl3 MFC set to  0.000000
5/28/2010	4:00:30 PM	SiCl4 MFC set to  0.000000
5/28/2010	4:00:30 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	4:00:30 PM	Tube furnace set to 0
5/28/2010	4:00:30 PM	Helium valve closed
5/28/2010	4:00:30 PM	H2 valve closed
5/28/2010	4:00:30 PM	BCl3 valve closed
5/28/2010	4:00:30 PM	PH3 valve closed
5/28/2010	4:00:30 PM	SiCl4 pre valve closed
5/28/2010	4:00:30 PM	SiCl4 post valve closed
5/28/2010	4:00:30 PM	Main Vac valve closed
5/28/2010	4:00:30 PM	Bypass valve closed
5/28/2010	4:00:30 PM	Bubbler valve closed
5/28/2010	4:00:30 PM	Helium MFC set to  0.000000
5/28/2010	4:00:30 PM	H2 MFC set to  0.000000
5/28/2010	4:00:30 PM	BCl3 MFC set to  0.000000
5/28/2010	4:00:30 PM	PHl3 MFC set to  0.000000
5/28/2010	4:00:30 PM	SiCl4 MFC set to  0.000000
5/28/2010	4:00:30 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	4:00:30 PM	Tube furnace set to 0
5/28/2010	4:00:30 PM	Run finished at 4:00 PM
5/28/2010	4:00:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/28/2010	4:00:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/28/2010	4:00:33 PM	Recipe started at 4:00 PM
5/28/2010	4:00:33 PM	Helium valve closed
5/28/2010	4:00:33 PM	H2 valve closed
5/28/2010	4:00:33 PM	BCl3 valve closed
5/28/2010	4:00:33 PM	PH3 valve closed
5/28/2010	4:00:33 PM	SiCl4 pre valve closed
5/28/2010	4:00:33 PM	SiCl4 post valve closed
5/28/2010	4:00:33 PM	Main Vac valve closed
5/28/2010	4:00:33 PM	Bubbler valve closed
5/28/2010	4:00:33 PM	Bypass valve opened
5/28/2010	4:00:33 PM	Helium MFC set to  0.000000
5/28/2010	4:00:33 PM	H2 MFC set to  0.000000
5/28/2010	4:00:33 PM	BCl3 MFC set to  0.000000
5/28/2010	4:00:33 PM	PHl3 MFC set to  0.000000
5/28/2010	4:00:33 PM	SiCl4 MFC set to  0.000000
5/28/2010	4:00:33 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	4:00:33 PM	Tube furnace set to 0
5/28/2010	4:01:21 PM	Helium valve closed
5/28/2010	4:01:21 PM	H2 valve closed
5/28/2010	4:01:21 PM	BCl3 valve closed
5/28/2010	4:01:21 PM	PH3 valve closed
5/28/2010	4:01:21 PM	SiCl4 pre valve closed
5/28/2010	4:01:21 PM	SiCl4 post valve closed
5/28/2010	4:01:21 PM	Bubbler valve closed
5/28/2010	4:01:21 PM	Main Vac valve opened
5/28/2010	4:01:21 PM	Bypass valve opened
5/28/2010	4:01:21 PM	Helium MFC set to  0.000000
5/28/2010	4:01:21 PM	H2 MFC set to  0.000000
5/28/2010	4:01:21 PM	BCl3 MFC set to  0.000000
5/28/2010	4:01:21 PM	PHl3 MFC set to  0.000000
5/28/2010	4:01:21 PM	SiCl4 MFC set to  0.000000
5/28/2010	4:01:21 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	4:01:21 PM	Tube furnace set to 0
5/28/2010	4:01:22 PM	Run finished at 4:01 PM
5/28/2010	4:01:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/28/2010	4:45:31 PM	Helium valve opened
5/28/2010	4:45:34 PM	Helium MFC set to  500.000000
5/28/2010	4:48:35 PM	Helium MFC set to  0.000000
5/28/2010	4:48:36 PM	Helium valve closed
5/28/2010	4:49:22 PM	Helium MFC set to  500.000000
5/28/2010	4:49:23 PM	Helium valve opened
5/28/2010	4:51:30 PM	Helium MFC set to  0.000000
5/28/2010	4:51:30 PM	Helium valve closed
5/28/2010	4:52:17 PM	Bypass valve closed
5/28/2010	4:52:17 PM	Main Vac valve closed
5/28/2010	4:52:29 PM	Main Vac valve opened
5/28/2010	4:52:30 PM	Bypass valve opened
5/28/2010	4:53:11 PM	Helium MFC set to  500.000000
5/28/2010	4:53:12 PM	Helium valve opened
5/28/2010	4:53:55 PM	Helium MFC set to  0.000000
5/28/2010	4:53:56 PM	Helium valve closed
5/28/2010	4:54:58 PM	Recipe started at 4:54 PM
5/28/2010	4:54:58 PM	Helium valve closed
5/28/2010	4:54:58 PM	BCl3 valve closed
5/28/2010	4:54:58 PM	PH3 valve closed
5/28/2010	4:54:58 PM	SiCl4 pre valve closed
5/28/2010	4:54:58 PM	SiCl4 post valve closed
5/28/2010	4:54:58 PM	Main Vac valve closed
5/28/2010	4:54:58 PM	Bypass valve closed
5/28/2010	4:54:58 PM	Bubbler valve closed
5/28/2010	4:54:58 PM	H2 valve opened
5/28/2010	4:54:58 PM	Helium MFC set to  0.000000
5/28/2010	4:54:58 PM	H2 MFC set to  500.000000
5/28/2010	4:54:58 PM	BCl3 MFC set to  0.000000
5/28/2010	4:54:58 PM	PHl3 MFC set to  0.000000
5/28/2010	4:54:58 PM	SiCl4 MFC set to  0.000000
5/28/2010	4:54:58 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	4:54:59 PM	Tube furnace set to 0
5/28/2010	4:56:21 PM	Helium valve closed
5/28/2010	4:56:21 PM	BCl3 valve closed
5/28/2010	4:56:21 PM	PH3 valve closed
5/28/2010	4:56:21 PM	SiCl4 pre valve closed
5/28/2010	4:56:21 PM	SiCl4 post valve closed
5/28/2010	4:56:21 PM	Main Vac valve closed
5/28/2010	4:56:21 PM	Bypass valve closed
5/28/2010	4:56:21 PM	H2 valve opened
5/28/2010	4:56:21 PM	Bubbler valve opened
5/28/2010	4:56:21 PM	Helium MFC set to  0.000000
5/28/2010	4:56:21 PM	H2 MFC set to  500.000000
5/28/2010	4:56:21 PM	BCl3 MFC set to  0.000000
5/28/2010	4:56:21 PM	PHl3 MFC set to  0.000000
5/28/2010	4:56:21 PM	SiCl4 MFC set to  0.000000
5/28/2010	4:56:21 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	4:56:21 PM	Tube furnace set to 1000
5/28/2010	5:16:21 PM	Helium valve closed
5/28/2010	5:16:21 PM	PH3 valve closed
5/28/2010	5:16:21 PM	Main Vac valve closed
5/28/2010	5:16:21 PM	Bypass valve closed
5/28/2010	5:16:21 PM	H2 valve opened
5/28/2010	5:16:21 PM	BCl3 valve opened
5/28/2010	5:16:21 PM	SiCl4 pre valve opened
5/28/2010	5:16:21 PM	SiCl4 post valve opened
5/28/2010	5:16:21 PM	Bubbler valve opened
5/28/2010	5:16:21 PM	Helium MFC set to  0.000000
5/28/2010	5:16:21 PM	H2 MFC set to  500.000000
5/28/2010	5:16:21 PM	BCl3 MFC set to  35.000000
5/28/2010	5:16:21 PM	PHl3 MFC set to  0.000000
5/28/2010	5:16:21 PM	SiCl4 MFC set to  50.000000
5/28/2010	5:16:21 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	5:16:21 PM	Tube furnace set to 1000
5/28/2010	5:31:21 PM	H2 valve closed
5/28/2010	5:31:21 PM	BCl3 valve closed
5/28/2010	5:31:21 PM	PH3 valve closed
5/28/2010	5:31:21 PM	SiCl4 pre valve closed
5/28/2010	5:31:21 PM	SiCl4 post valve closed
5/28/2010	5:31:21 PM	Main Vac valve closed
5/28/2010	5:31:21 PM	Bypass valve closed
5/28/2010	5:31:21 PM	Helium valve opened
5/28/2010	5:31:21 PM	Bubbler valve opened
5/28/2010	5:31:21 PM	Helium MFC set to  500.000000
5/28/2010	5:31:21 PM	H2 MFC set to  0.000000
5/28/2010	5:31:21 PM	BCl3 MFC set to  0.000000
5/28/2010	5:31:21 PM	PHl3 MFC set to  0.000000
5/28/2010	5:31:21 PM	SiCl4 MFC set to  0.000000
5/28/2010	5:31:21 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	5:31:22 PM	Tube furnace set to 0
5/28/2010	5:51:22 PM	Helium valve closed
5/28/2010	5:51:22 PM	H2 valve closed
5/28/2010	5:51:22 PM	BCl3 valve closed
5/28/2010	5:51:22 PM	PH3 valve closed
5/28/2010	5:51:22 PM	SiCl4 pre valve closed
5/28/2010	5:51:22 PM	SiCl4 post valve closed
5/28/2010	5:51:22 PM	Main Vac valve closed
5/28/2010	5:51:22 PM	Bypass valve closed
5/28/2010	5:51:22 PM	Bubbler valve closed
5/28/2010	5:51:22 PM	Helium MFC set to  0.000000
5/28/2010	5:51:22 PM	H2 MFC set to  0.000000
5/28/2010	5:51:22 PM	BCl3 MFC set to  0.000000
5/28/2010	5:51:22 PM	PHl3 MFC set to  0.000000
5/28/2010	5:51:22 PM	SiCl4 MFC set to  0.000000
5/28/2010	5:51:22 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	5:51:22 PM	Tube furnace set to 0
5/28/2010	5:51:22 PM	Run finished at 5:51 PM
5/28/2010	6:04:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/28/2010	6:04:56 PM	Recipe started at 6:04 PM
5/28/2010	6:04:56 PM	H2 valve closed
5/28/2010	6:04:56 PM	BCl3 valve closed
5/28/2010	6:04:56 PM	PH3 valve closed
5/28/2010	6:04:56 PM	SiCl4 pre valve closed
5/28/2010	6:04:56 PM	SiCl4 post valve closed
5/28/2010	6:04:56 PM	Main Vac valve closed
5/28/2010	6:04:56 PM	Bypass valve closed
5/28/2010	6:04:56 PM	Bubbler valve closed
5/28/2010	6:04:56 PM	Helium valve opened
5/28/2010	6:04:56 PM	Helium MFC set to  500.000000
5/28/2010	6:04:56 PM	H2 MFC set to  0.000000
5/28/2010	6:04:56 PM	BCl3 MFC set to  0.000000
5/28/2010	6:04:56 PM	PHl3 MFC set to  0.000000
5/28/2010	6:04:56 PM	SiCl4 MFC set to  0.000000
5/28/2010	6:04:56 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	6:04:56 PM	Tube furnace set to 0
5/28/2010	6:05:00 PM	Helium valve closed
5/28/2010	6:05:00 PM	H2 valve closed
5/28/2010	6:05:00 PM	BCl3 valve closed
5/28/2010	6:05:00 PM	PH3 valve closed
5/28/2010	6:05:00 PM	SiCl4 pre valve closed
5/28/2010	6:05:00 PM	SiCl4 post valve closed
5/28/2010	6:05:00 PM	Main Vac valve closed
5/28/2010	6:05:00 PM	Bypass valve closed
5/28/2010	6:05:00 PM	Bubbler valve closed
5/28/2010	6:05:00 PM	Helium MFC set to  0.000000
5/28/2010	6:05:00 PM	H2 MFC set to  0.000000
5/28/2010	6:05:00 PM	BCl3 MFC set to  0.000000
5/28/2010	6:05:00 PM	PHl3 MFC set to  0.000000
5/28/2010	6:05:00 PM	SiCl4 MFC set to  0.000000
5/28/2010	6:05:00 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	6:05:01 PM	Tube furnace set to 0
5/28/2010	6:05:01 PM	Run finished at 6:05 PM
5/28/2010	6:05:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/28/2010	6:06:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/28/2010	6:06:35 PM	Recipe started at 6:06 PM
5/28/2010	6:06:35 PM	H2 valve closed
5/28/2010	6:06:35 PM	BCl3 valve closed
5/28/2010	6:06:35 PM	PH3 valve closed
5/28/2010	6:06:35 PM	SiCl4 pre valve closed
5/28/2010	6:06:35 PM	SiCl4 post valve closed
5/28/2010	6:06:35 PM	Main Vac valve closed
5/28/2010	6:06:35 PM	Bypass valve closed
5/28/2010	6:06:35 PM	Bubbler valve closed
5/28/2010	6:06:35 PM	Helium valve opened
5/28/2010	6:06:35 PM	Helium MFC set to  500.000000
5/28/2010	6:06:35 PM	H2 MFC set to  0.000000
5/28/2010	6:06:35 PM	BCl3 MFC set to  0.000000
5/28/2010	6:06:35 PM	PHl3 MFC set to  0.000000
5/28/2010	6:06:35 PM	SiCl4 MFC set to  0.000000
5/28/2010	6:06:35 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	6:06:35 PM	Tube furnace set to 0
5/28/2010	6:06:36 PM	Helium valve closed
5/28/2010	6:06:36 PM	H2 valve closed
5/28/2010	6:06:36 PM	BCl3 valve closed
5/28/2010	6:06:36 PM	PH3 valve closed
5/28/2010	6:06:36 PM	SiCl4 pre valve closed
5/28/2010	6:06:36 PM	SiCl4 post valve closed
5/28/2010	6:06:36 PM	Main Vac valve closed
5/28/2010	6:06:36 PM	Bypass valve closed
5/28/2010	6:06:36 PM	Bubbler valve closed
5/28/2010	6:06:36 PM	Helium MFC set to  0.000000
5/28/2010	6:06:36 PM	H2 MFC set to  0.000000
5/28/2010	6:06:36 PM	BCl3 MFC set to  0.000000
5/28/2010	6:06:36 PM	PHl3 MFC set to  0.000000
5/28/2010	6:06:36 PM	SiCl4 MFC set to  0.000000
5/28/2010	6:06:36 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	6:06:36 PM	Tube furnace set to 0
5/28/2010	6:06:36 PM	Run finished at 6:06 PM
5/28/2010	6:06:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/28/2010	6:06:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/28/2010	6:06:38 PM	Recipe started at 6:06 PM
5/28/2010	6:06:38 PM	Helium valve closed
5/28/2010	6:06:39 PM	H2 valve closed
5/28/2010	6:06:39 PM	BCl3 valve closed
5/28/2010	6:06:39 PM	PH3 valve closed
5/28/2010	6:06:39 PM	SiCl4 pre valve closed
5/28/2010	6:06:39 PM	SiCl4 post valve closed
5/28/2010	6:06:39 PM	Main Vac valve closed
5/28/2010	6:06:39 PM	Bubbler valve closed
5/28/2010	6:06:39 PM	Bypass valve opened
5/28/2010	6:06:39 PM	Helium MFC set to  0.000000
5/28/2010	6:06:39 PM	H2 MFC set to  0.000000
5/28/2010	6:06:39 PM	BCl3 MFC set to  0.000000
5/28/2010	6:06:39 PM	PHl3 MFC set to  0.000000
5/28/2010	6:06:39 PM	SiCl4 MFC set to  0.000000
5/28/2010	6:06:39 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	6:06:39 PM	Tube furnace set to 0
5/28/2010	6:07:22 PM	Helium valve closed
5/28/2010	6:07:22 PM	H2 valve closed
5/28/2010	6:07:22 PM	BCl3 valve closed
5/28/2010	6:07:22 PM	PH3 valve closed
5/28/2010	6:07:22 PM	SiCl4 pre valve closed
5/28/2010	6:07:22 PM	SiCl4 post valve closed
5/28/2010	6:07:22 PM	Bubbler valve closed
5/28/2010	6:07:22 PM	Main Vac valve opened
5/28/2010	6:07:22 PM	Bypass valve opened
5/28/2010	6:07:22 PM	Helium MFC set to  0.000000
5/28/2010	6:07:22 PM	H2 MFC set to  0.000000
5/28/2010	6:07:22 PM	BCl3 MFC set to  0.000000
5/28/2010	6:07:22 PM	PHl3 MFC set to  0.000000
5/28/2010	6:07:22 PM	SiCl4 MFC set to  0.000000
5/28/2010	6:07:22 PM	Bypass solenoid MFC set to  0.000000
5/28/2010	6:07:22 PM	Tube furnace set to 0
5/28/2010	6:07:23 PM	Run finished at 6:07 PM
5/28/2010	6:07:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
